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Design, fabrication, and testing of micro-electro-mechanical systems (MEMS) and devices is a major area of focus in our laboratory. We employ micro- and nano-fabrication techniques to build various sensors and actuators for various applications.

Devices developed in our group include:
  • Ultra-sensitive, wideband accelerometers
  • Nonlinear gyroscopes
  • Directional light sensors
  • Magnetic field sensors
  • Electric field sensors
  • Timing resonators
  • Micromechanical filters
  • Gas sensors
  • Charge sensors
  • Passive RF MEMS